Dr.LiTHO includes models and algorithms for the simulation, evaluation, and optimization of lithographic processes using optical or EUV image projection. These models describe advanced mask illumination schemes, the light diffraction from the mask, the image formation in dry and immersion projection systems, the interaction of light and the photoresist, and the resist processing during baking steps and chemical development. Several modules of Dr.LiTHO support the evaluation of the computed images and resist profiles with respect to process variations. The flexible scripting concept of Dr.LiTHO supports the setup of complex simulation flows and the coupling with other simulation packages, such as advanced optimization algorithms developed at IISB and third-party software packages. Additionally, Dr.LiTHO comes with simulation models that describe the projection printing processes in semiconductor lithography. And Dr.LiTHO can also be used for the simulation of alternative exposure methods and for applications of lithography in other fields of micro- and nanofabrication.
Dr.LiTHO is available under Linux and Windows. In order to provide a high degree of flexibilty, Dr.LiTHO uses Python as a frontend language. But to use it, one does not have to be an expert in programming or Python. Standard tasks require nothing more than setting parameters or selecting simulation steps. Plus, Dr.LiTHO comes with several software tutorials and a large scripting library for various applications.
If that's not enough, numerous tutorials will support the user in writing customized scripts. Since Python is a modern, object-oriented programming language, it is easy to define new workflows or integrate special-purpose algorithms and models. In addition, the user can access a large number Python modules for all kinds of tasks including numeric and visualization.