News and Events

11th Lithography Simulation Workshop
September 26-28, 2013 in Hersbruck, Germany

Distribution of Fraunhofer IISB Lithography Simulation Software Dr.LiTHO

Since 2008, the Fraunhofer IISB is marketing its advanced and proven lithography simulation models and software algorithms in its development and research simulator Dr.LiTHO. The software can be purchased from Fraunhofer IISB.

Dr.LiTHO Waveguide with parallelization

A parallelized version of the rigorous EMF solver Waveguide will soon be available. The parallelization is realized in combination with a decomposition technique which is part of the Waveguide solver. The new feature allows fast three dimensional rigorous simulations of larger lithography mask areas. The following example demonstrates the possible performance: