Contact

Fraunhofer Institute of Integrated Systems and Device Technology (IISB)
Lithography Simulation Group
Schottkystrasse 10

91058 Erlangen

Contact: 

Dr. Andreas Erdmann
Email: andreas.erdmann@iisb.fraunhofer.de
Phone: +49 9131 761-258
Fax:    +49 9131 761-212